The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Nov. 22, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Ashish Bhatnagar, Fremont, CA (US);
Laxman Murugesh, San Ramon, CA (US);
Padma Gopalakrishnan, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C04B 41/00 (2006.01); B23K 26/00 (2014.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); C03B 25/02 (2006.01);
U.S. Cl.
CPC ...
C04B 41/0036 (2013.01); B23K 26/0066 (2013.01); C03B 25/02 (2013.01); H01L 21/67115 (2013.01); H01L 21/6831 (2013.01); Y10T 428/131 (2015.01);
Abstract
A method of fabricating a processing chamber component comprises forming a processing chamber component having a structural body with surface regions having microcracks, and directing a laser beam onto the microcracks of the surface regions of the structural body for a sufficient time to heal and close off the microcracks by themselves.