The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Feb. 22, 2016
Applicant:
Ams International Ag, Rapperswil-Jona, CH;
Inventors:
Axel Nackaerts, Heverlee, BE;
Willem Frederik Adrianus Besling, Eindhoven, NL;
Klaus Reimann, Eindhoven, NL;
Assignee:
AMS INTERNATIONAL AG, Rapperswil-Jona, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 21/00 (2006.01); H01L 21/20 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00246 (2013.01); G01L 9/0073 (2013.01); B81C 2203/0735 (2013.01); B81C 2203/0771 (2013.01);
Abstract
Disclosed is an integrated circuit, comprising a semiconductor substrate carrying a plurality of circuit elements; and a pressure sensor including a cavity on said semiconductor substrate, said cavity comprising a pair of electrodes laterally separated from each other; and a flexible membrane over and spatially separated from said electrodes such that said membrane interferes with a fringe field between said electrodes, said membrane comprising at least one aperture. A method of manufacturing such an IC is also disclosed.