The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Mar. 13, 2012
Applicants:
Takeo Sato, Imizu, JP;
Yuichiro Nagamine, Toyama, JP;
Inventors:
Takeo Sato, Imizu, JP;
Yuichiro Nagamine, Toyama, JP;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/04 (2006.01); H03H 9/10 (2006.01); C04B 35/46 (2006.01); C04B 35/48 (2006.01); H01L 41/22 (2013.01); H01L 41/25 (2013.01); H03H 3/02 (2006.01); G01N 29/02 (2006.01); G01N 29/036 (2006.01); G01H 3/00 (2006.01);
U.S. Cl.
CPC ...
H03H 3/04 (2013.01); C04B 35/46 (2013.01); C04B 35/48 (2013.01); H01L 41/22 (2013.01); H01L 41/25 (2013.01); H03H 3/02 (2013.01); H03H 9/10 (2013.01); H03H 9/105 (2013.01); H03H 9/1021 (2013.01); H03H 9/1092 (2013.01); G01H 3/00 (2013.01); G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/0426 (2013.01); H03H 2003/022 (2013.01); H03H 2003/0485 (2013.01); Y10T 29/42 (2015.01); Y10T 29/49005 (2015.01);
Abstract
A method for manufacturing a piezoelectric vibration device wherein a substrate is prepared, and a piezoelectric resonator element is mounted on the substrate. Before or after a packaging member is joined to the substrate, the piezoelectric resonator element is exposed to an environment at a higher temperature than ambient temperature and a higher humidity than ambient humidity, and then an electrical property is measured to detect attachment of dust and/or foreign matter according to a variation of the electrical property.