The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Sep. 29, 2015
Applicant:
Lightmachinery Inc., Nepean, CA;
Inventors:
Adam Donaldson, Bedford, CA;
Edward S. Williams, Kanata, CA;
John H. Hunter, Almonte, CA;
Tekai Akuetteh, Ottawa, CA;
Ian J. Miller, Ottawa, CA;
Assignee:
LightMachinery Inc., Nepean, CA;
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/13 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
H01S 3/1303 (2013.01); H01S 3/225 (2013.01);
Abstract
The disclosure relates to the removal of hydrogen fluoride (HF) from an excimer laser either in operation or in standby using a metal halide salt reactor. Removal of HF is desirable because the contaminant not only absorbs laser emission, thus reducing laser power, but it is also chemically reactive, and degrades the lifetime of internal laser components. The metal halide salt reactor may be provided either in the laser vessel or in an external conduit loop.