The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Apr. 01, 2016
SK Hynix Inc., Gyeonggi-do, KR;
SK Hynix Inc., Gyeonggi-do, KR;
Abstract
A method for forming patterns includes forming ellipse pillars on an underlying layer. The ellipse pillar has an elongated feature and includes nose sides and long sides connecting the nose sides, and the four ellipse pillars form a diamond array around a separation space. A guide lattice attached to sides of the ellipse pillars is formed to open first windows in the separation space. Second windows are formed in the guide lattice by selectively removing the ellipse pillars. A block copolymer layer is formed to fill the first and second windows. The block copolymer layer is phase-separated to form a first domain and a first matrix in the first window and to form a plurality of second domains and second matrix in the second window. The first and second domains are selectively removed to form first openings and second openings.