The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Dec. 17, 2014
Institut National D'optique, Québec (Québec), CA;
Hassane Oulachgar, Québec, CA;
Christine Alain, Québec, CA;
INSTITUT NATIONAL D'OPTIQUE, Quebec, Quebec, CA;
Abstract
An uncooled microbolometer pixel for detection of electromagnetic radiation is provided that includes a substrate, a thermistor assembly and an absorber assembly. The thermistor assembly includes a thermistor platform suspended above the substrate, one or more thermistors on the thermistor platform, and an electrode structure electrically connecting the thermistors to the substrate. The absorber assembly includes an optical absorber over the thermistor assembly and a reflector provided under and forming a resonant cavity with the optical absorber. The optical absorber is in thermal contact with the thermistors and exposed to the electromagnetic radiation. The optical absorber includes a set of elongated resonators determining an absorption spectrum of the optical absorber. An array of microbolometer pixels is also provided, in which the resonators of different pixels can have different lengths determining different absorption spectra, thereby enabling configurable broadband and/or multi-frequency detection, in particular in the terahertz region.