The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 25, 2016

Filed:

Jul. 12, 2012
Applicants:

Romain Viard, Lille, FR;

Abdelkrim Talbi, La Madeleine, FR;

Philippe Jacques Pernod, Lille, FR;

Alain Merlen, Lille, FR;

Vladimir Preobrazhensky, Villeneuve d'Ascq, FR;

Inventors:

Romain Viard, Lille, FR;

Abdelkrim Talbi, La Madeleine, FR;

Philippe Jacques Pernod, Lille, FR;

Alain Merlen, Lille, FR;

Vladimir Preobrazhensky, Villeneuve d'Ascq, FR;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/688 (2006.01); B81B 3/00 (2006.01); G01F 1/684 (2006.01); G01L 21/12 (2006.01); H01L 41/316 (2013.01); H01L 41/332 (2013.01);
U.S. Cl.
CPC ...
G01F 1/688 (2013.01); B81B 3/0081 (2013.01); G01F 1/6845 (2013.01); G01F 1/6882 (2013.01); G01L 21/12 (2013.01); H01L 41/316 (2013.01); H01L 41/332 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0292 (2013.01); B81B 2203/0109 (2013.01);
Abstract

The invention relates to a miniaturized sensor having a heating element, and to an associated production method. The sensor includes a substrate, a cavity and a heat-insulating structure suspended above the cavity by areas connecting to the substrate. The heat-insulating structure includes at least two bridges extending above the cavity, the heating element being supported by said bridges, extending transversely thereto.


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