The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Jul. 31, 2013
Honeywell International Inc., Morristown, NJ (US);
Timothy J. Hanson, Plymouth, MN (US);
Mark W. Weber, Zimmerman, MN (US);
Max C. Glenn, Chanhassen, MN (US);
Drew A. Karnick, Blaine, MN (US);
Honeywell International Inc., Morris Plains, NJ (US);
Abstract
A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.