The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2016

Filed:

Aug. 15, 2014
Applicant:

Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, Guangdong, CN;

Inventors:

Haifeng Deng, Guangdong, CN;

Jia Li, Guangdong, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05K 3/00 (2006.01); B65G 49/06 (2006.01); H01L 21/673 (2006.01); C03C 15/00 (2006.01); C09K 13/08 (2006.01); H01L 31/18 (2006.01); H01L 51/56 (2006.01); H05K 3/06 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H05K 3/068 (2013.01); B65G 49/064 (2013.01); C03C 15/00 (2013.01); C09K 13/08 (2013.01); H01L 21/6776 (2013.01); H01L 21/67706 (2013.01); H01L 31/18 (2013.01); H01L 51/56 (2013.01);
Abstract

The present invention provides a substrate delivery device and a strong acid or strong base etching adequate for a wet process. The substrate delivery device comprises: a plurality of first delivery rollers () parallel to one another in an etching chamber (), a plurality of second delivery rollers () parallel to one another in a cleaning chamber () and a carrier () employed for carrying a substrate (); the carrier () comprises two first side frames () located along a direction of delivering the substrate (), two second side frames () connected to ends of the two first side frames (), a plurality of first and second connection parts () which are intercrossing and orthogonal in an area surrounded by the two first side frames () and the two second side frames () and a plurality of supports () at joins of the plurality of first and second connection parts (); the plurality of first and second connection parts () are intercrossing and orthogonal with one another to form a plurality of hollow parts (); the substrate () is located on the carrier ().


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