The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2016

Filed:

Jul. 23, 2013
Applicant:

Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;

Inventors:

Haruki Ogo, Inuyama, JP;

Hiroyuki Shimada, Inuyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67772 (2013.01); H01L 21/67126 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01);
Abstract

A mounting port that allows an article to be relayed between a worker and a conveying apparatus or a processing device in a clean room includes a shutter that raises little or no dust and has a simple opening and closing mechanism. The mounting port includes an article mounting stand, an apparatus-side opening that allows a conveying apparatus or a processing device to pass an article to and from the mounting stand, a passageway-side opening that faces a worker passageway, shutters that are provided at positions to open and close the apparatus-side opening and includes arc-shaped plates or plates, and a swing mechanism that swings the shutters between a state in which the apparatus-side opening is opened and a state in which the apparatus-side opening is closed.


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