The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Aug. 07, 2013
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Inventors:
Assignee:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
F26B 25/06 (2006.01); H01L 21/677 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67359 (2013.01); F26B 25/06 (2013.01); H01L 21/67393 (2013.01);
Abstract
Provided is a reticle storage container including an inner containerwhich can store a plurality of reticlesand an outer containerwhich covers the inner container. The outer containeris configured to include a gas nozzlewhich can inject a predetermined gas. The same gas as the gas supplied into an exposure apparatusis supplied to the gas nozzle. The gas injected into the reticle storage container is vented through a vent holeinstalled to the inner container