The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Oct. 18, 2013
Applicant:
Fujikin Incorporated, Osaka, JP;
Inventors:
Mutsunori Koyomogi, Osaka, JP;
Takashi Hirose, Osaka, JP;
Michio Yamaji, Osaka, JP;
Takahiro Matsuda, Osaka, JP;
Assignee:
FUJIKIN INCORPORATED, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 11/22 (2006.01); F16K 11/24 (2006.01); F15B 13/044 (2006.01); G05D 7/00 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
G05D 7/00 (2013.01); F15B 13/044 (2013.01); G05D 7/0682 (2013.01); Y10T 137/87249 (2015.04); Y10T 137/87885 (2015.04);
Abstract
A plurality of stacked and fixed gas supplying units U, each gas supplying unit U having at least four gas supply lines S is formed by opposingly combining and fixing two flow controllers, each flow controllerprovided with a plurality of flow control units, to a gas inlet-side blockand a gas outlet-side blockthat are disposed in parallel across an interval in plan view and providing each flow controllerwith an inlet opening and closing valveand an outlet opening and closing valve