The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2016

Filed:

Oct. 09, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Terence L. Kane, Wappinger Falls, NY (US);

Matthew F. Stanton, Salt Point, NY (US);

Robert P. Marsin, Middletown, NY (US);

Jochonia N. Nxumalo, Wappinger Falls, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 30/20 (2010.01); B65D 51/16 (2006.01); H01J 37/20 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
G01Q 30/20 (2013.01); B65D 51/1644 (2013.01); H01J 37/20 (2013.01); H01J 37/3053 (2013.01);
Abstract

An apparatus and method for facilitating Atomic Force Microscopy, SEM Nano-Probing, Scanning Probe Microscopy, and Collimated Ion Milling, through the implementation of a removable, magnetized fixture for fixing the position of a sample requiring surface treatment, the fixture attachable to a holder requiring surface treatment, the holder being mountable in various instruments, the fixture being transportable in a container having a magnetized surface plate or disc for magnetic attachment of said fixture, with the container having a valve to permit alternative evacuation and backfill with an inert gas to protect the sample surface.


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