The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Sep. 30, 2011
Hyeong-gyun Jeong, Gyeonggi-do, KR;
Jin-woo Song, Seoul, KR;
Hyeong-Gyun Jeong, Gyeonggi-do, KR;
Jin-Woo Song, Seoul, KR;
MICROINFINITY, INC., Suwon-Si, KR;
Abstract
Provided is a micro electro mechanical system (MEMS) resonating accelerometer. The MEMS resonating accelerometer according to the present invention comprises: a first inertial mass; a second inertial mass which is spaced at a predetermined distance from the first inertial mass on a first axis; an elastic body which is provided between the first and second inertial masses so as to apply elasticity; and a tuning fork which is connected to the elastic body and measures the change of frequency according to acceleration, wherein the longitudinal direction of the tuning fork is parallel to a second axis which is perpendicular to the first axis, the elastic body has an opening portion being in a circular shape with a portion thereof removed, and one end of the tuning fork penetrates the opening portion and is connected to the inner surface of the elastic body.