The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Feb. 18, 2014
Lam Research Corporation, Fremont, CA (US);
Eugenijus Norkus, Vilnius, LT;
Aldona Jagminiene, Vilnius, LT;
Albina Zieliene, Vilnius, LT;
Ina Stankeviciene, Vilnius, LT;
Loreta Tamasauskaite-Tamasiunaite, Vilnius, LT;
Aniruddha Joi, Fremont, CA (US);
Yezdi Dordi, Palo Alto, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for providing an electroless plating of a platinum containing layer is provided. A Tistabilization solution is provided. A Ptstabilization solution is provided. A flow from the Tistabilization solution is combined with a flow from the Ptstabilization solution and water to provide a diluted mixture of the Tistabilization solution and the Ptstabilization solution. A substrate is exposed to the diluted mixture of the Tistabilization solution and the Ptstabilization solution.