The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2016

Filed:

May. 26, 2015
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Sang-Jine Park, Yongin-si, KR;

Bo-Un Yoon, Seoul, KR;

Jeong-Nam Han, Seoul, KR;

Myung-Geun Song, Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); H01L 29/417 (2006.01); H01L 29/78 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66636 (2013.01); H01L 21/28518 (2013.01); H01L 21/76802 (2013.01); H01L 29/4175 (2013.01); H01L 29/41775 (2013.01); H01L 29/665 (2013.01); H01L 29/6659 (2013.01); H01L 29/66545 (2013.01); H01L 29/66628 (2013.01); H01L 29/7834 (2013.01); H01L 29/7845 (2013.01); H01L 29/7848 (2013.01); H01L 29/495 (2013.01); H01L 29/4966 (2013.01);
Abstract

Provided are a semiconductor device, which can facilitate a salicide process and can prevent a gate from being damaged due to misalign, and a method of manufacturing of the semiconductor device. The method includes forming a first insulation layer pattern on a substrate having a gate pattern and a source/drain region formed at both sides of the gate pattern, the first insulation layer pattern having an exposed portion of the source/drain region, forming a silicide layer on the exposed source/drain region, forming a second insulation layer on the entire surface of the substrate to cover the first insulation layer pattern and the silicide layer, and forming a contact hole in the second insulation layer to expose the silicide layer.


Find Patent Forward Citations

Park, Sang-Jine. (2016). Semiconductor devices and methods of manufacturing the same (U.S. Patent No. 9466697). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9466697

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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