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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9466514 B1

PDFFull Text
Expired
Date of Patent:
Oct. 11, 2016

Filed:

Jun. 06, 2012

System for the heat treatment of substrates, and method for detecting measurement data in said system

Applicants:

Jochen Burkhardt, Berghulen, DE;

Milo Gaggioli, Blaubeuren, DE;

Inventors:

Jochen Burkhardt, Berghulen, DE;

Milo Gaggioli, Blaubeuren, DE;

Assignee:

Rehm Thermal Systems GmbH, Blaubeuren-Seissen, DE;

Attorneys:

Fattibene and Fattibene LI

Paul A. Fattibene

Primary Examiner:

Crystal J Barnes-Bullock

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/68 (2006.01); F27B 9/40 (2006.01); F27D 19/00 (2006.01); F27D 21/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67098 (2013.01); F27B 9/40 (2013.01); F27D 19/00 (2013.01); F27D 21/0014 (2013.01); H01L 21/67115 (2013.01); H01L 21/67173 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 21/67745 (2013.01); H01L 21/68 (2013.01); H01L 21/681 (2013.01);
Abstract

The present invention relates to a device () for the heat treatment of substrates and to a method for recording measurement data in said device, where said device () comprises at least one heatable chamber (), a carrier system (), a sensor assembly (), and an actuator () that is independent of the carrier system (). The carrier system () is designed to carry substrates, whereas the sensor assembly () is further configured for coupling to a data recording and/or data storage device (). The actuator () is coupled to the sensor assembly () and is configured to position the sensor assembly () within the heatable chamber ().

Find Patent Forward Citations

Burkhardt, Jochen. (2016). System for the heat treatment of substrates, and method for detecting measurement data in said system (U.S. Patent No. 9466514). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9466514

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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