The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2016

Filed:

Jun. 23, 2014
Applicant:

The Trustees of Columbia University IN the City of New York, New York, NY (US);

Inventors:

James S. Im, New York, NY (US);

Paul Christiaan van der Wilt, New York, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 29/04 (2006.01); G21K 5/02 (2006.01); C30B 13/24 (2006.01); C30B 35/00 (2006.01); H01L 21/20 (2006.01); H01L 27/12 (2006.01); G21K 5/10 (2006.01);
U.S. Cl.
CPC ...
G21K 5/02 (2013.01); C30B 13/24 (2013.01); C30B 35/00 (2013.01); G21K 5/10 (2013.01); H01L 21/2026 (2013.01); H01L 27/1285 (2013.01); H01L 27/1296 (2013.01); H01L 29/04 (2013.01);
Abstract

Process and system for processing a thin film sample, as well as at least one portion of the thin film structure are provided. Irradiation beam pulses can be shaped to define at least one line-type beam pulse, which includes a leading portion, a top portion and a trailing portion, in which at least one part has an intensity sufficient to at least partially melt a film sample. Irradiating a first portion of the film sample to at least partially melt the first portion, and allowing the first portion to resolidify and crystallize to form an approximately uniform area therein. After the irradiation of the first portion of the film sample, irradiating a second portion using a second one of the line-type beam pulses to at least partially melt the second portion, and allowing the second portion to resolidify and crystallize to form an approximately uniform area therein. A section of the first portion impacted by the top portion of the first one of the line-type beam pulses is prevented from being irradiated by trailing portion of the second one of the line-type beam pulses.


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