The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2016

Filed:

Dec. 14, 2012
Applicants:

Cambridge Enterprise Limited, Cambridge, GB;

University of Bolton, Bolton, GB;

Inventors:

Andrew Flewitt, Cambridge, GB;

William Milne, Newmarket, GB;

Luis Garcia-Gancedo, Cambridge, GB;

Jack Luo, Cambridge, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/00 (2006.01); G01N 29/32 (2006.01); G01N 29/02 (2006.01); G01N 29/036 (2006.01); G01N 29/24 (2006.01);
U.S. Cl.
CPC ...
G01N 29/326 (2013.01); G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 29/2437 (2013.01); G01N 2291/0426 (2013.01);
Abstract

Provided is a method for measurement of a change in environment at a sensor. The sensor has: a first layer formed of a piezoelectric material; a second layer formed adjacent the first layer and acoustically coupled with the first layer; and electrodes disposed to apply a driving signal to the first layer to generate bulk acoustic waves. The temperature coefficient of frequency of the first layer is different to that of the second layer. In the method, a first layer resonant frequency associated with the first layer and a combination resonant frequency associated with a combination of the first and second layers are detected. A shift in one or both of the first layer resonant frequency and the combination resonant frequency is detected. A portion of the shift caused by a temperature change at the sensor is identified. Another portion of the shift caused by an environmental change at the sensor other than the temperature change is identified. Also provided is a corresponding sensor and sensor system operable to carry out the method.


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