The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Mar. 25, 2014
Jeo-young Shim, Yongin-si, KR;
Tae-han Jeon, Hwaseong-si, KR;
Dong-ho Lee, Seongnam-si, KR;
Hee-jeong Jeong, Suwon-si, KR;
Seong-ho Cho, Gwacheon-si, KR;
Jeo-young Shim, Yongin-si, KR;
Tae-han Jeon, Hwaseong-si, KR;
Dong-ho Lee, Seongnam-si, KR;
Hee-jeong Jeong, Suwon-si, KR;
Seong-ho Cho, Gwacheon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-Si, KR;
Abstract
A nanosensor may include a substrate that has a hole formed therein, a first insulating layer that is disposed on the substrate and has a nanopore formed therein, first and second electrodes that are disposed on the first insulating layer and are spaced apart from each other, first and second electrode pads that are disposed on the first and second electrodes, respectively, and a protective layer disposed on the first and second electrode pads. A method of manufacturing a nanosensor may include forming a first insulating layer, graphene, and a metal layer on a substrate, patterning the metal layer and the graphene, forming a protective layer on a portion of the graphene and the metal layer, exposing a portion of the graphene by removing a portion of the protective layer, forming a hole in the substrate, and forming a nanopore in the first insulating layer and the graphene to be connected to the hole.