The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Dec. 02, 2013
Applicant:
Samsung Display Co., Ltd., Yongin, KR;
Inventors:
Alexander Voronov, Yongin, RU;
Suk-Ho Lee, Yongin, KR;
Jae-Seung Yoo, Yongin, KR;
Kyung-Hoe Heo, Yongin, KR;
Gyoo-Wan Han, Yongin, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/64 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/6489 (2013.01); G01N 21/9501 (2013.01);
Abstract
A method for inspecting a polysilicon layer includes: radiating excitation light to the polysilicon layer; and detecting a photoluminescence signal generated by the excitation light, wherein average power of the excitation light has a range of 1 W/cmto 10 W/cm, and peak power of the excitation light has a range of 100 W/cmto 1000 W/cm.