The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Feb. 20, 2014
Applicant:
Rosemount Aerospace Inc., Burnsville, MN (US);
Inventors:
Weibin Zhang, Burnsville, MN (US);
Anita Fink, Burnsville, MN (US);
Saeed Fahimi, Bloomington, MN (US);
Kimiko J. Childress, Farmington, MN (US);
Assignee:
Rosemount Aerospace Inc., Burnsville, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/14 (2006.01); G01L 9/00 (2006.01); G01L 19/00 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
G01L 1/14 (2013.01); G01L 9/0047 (2013.01); G01L 9/0075 (2013.01); G01L 19/0076 (2013.01); G01L 19/0618 (2013.01);
Abstract
A capacitive pressure sensor includes a substrate wafer and a diaphragm wafer. The substrate wafer defines a substrate recess with a first recess. The diaphragm wafer defines a diaphragm recess with a second recess. The diaphragm wafer is bonded to the substrate wafer such that the substrate and diaphragm recesses form a height differentiated pressure chamber.