The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Dec. 23, 2013
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Haruhiko Horiguchi, Tokyo, JP;
Chihiro Nagura, Yokohama, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/00 (2006.01); G01D 5/347 (2006.01); G01B 7/00 (2006.01); H01L 27/146 (2006.01); G01D 5/244 (2006.01);
U.S. Cl.
CPC ...
G01D 5/34776 (2013.01); G01B 7/003 (2013.01); G01D 5/24438 (2013.01); G01D 5/34792 (2013.01); H01L 27/14625 (2013.01);
Abstract
A scale is used in a displacement detection apparatus () which detects a position of an object, the scale includes a pattern periodically formed in a measurement direction (an X direction), and the pattern is configured so as to change a physical property in a direction (a Y direction) perpendicular to the measurement direction without changing phase information in the measurement direction when a detector reading the pattern moves relative to the pattern in the direction perpendicular to the measurement direction.