The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Jun. 01, 2015
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Takashi Yamazaki, Shiojiri, JP;
Osamu Iwamoto, Chino, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/32 (2006.01); H01L 41/18 (2006.01); H01L 41/37 (2013.01); H03H 9/17 (2006.01); C22C 21/12 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01); H01L 41/09 (2006.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
H03H 9/171 (2013.01); C22C 21/12 (2013.01); C23C 14/06 (2013.01); C23C 14/0688 (2013.01); C23C 14/3414 (2013.01); H01L 41/18 (2013.01); H01L 41/37 (2013.01); H03B 5/32 (2013.01); H01L 41/094 (2013.01); H01L 41/187 (2013.01);
Abstract
A vibrator element includes: a base portion; and a vibrating arm extending from the base portion, the vibrating arm including a piezoelectric film that contains Cu at a crystal grain boundary.