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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9461615 B1

PDFFull Text
Expired
Date of Patent:
Oct. 04, 2016

Filed:

Jul. 14, 2014

Vibrator element, vibrator, oscillator, electronic apparatus, and moving object

Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Takashi Yamazaki, Shiojiri, JP;

Akihiko Ebina, Fujimi-machi, JP;

Tsuyoshi Tabata, Kawaguchi, JP;

Hidekazu Yanagisawa, Sakata, JP;

Assignee:

SEIKO EPSON CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Levi Gannon

Int. Cl.
CPC ...
H03B 5/32 (2006.01); H01L 41/047 (2006.01); H03H 9/17 (2006.01); H03H 9/21 (2006.01); H03H 9/10 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H03H 9/17 (2013.01); H01L 41/0472 (2013.01); H03B 5/32 (2013.01); H03H 9/1014 (2013.01); H03H 9/21 (2013.01); H01L 41/0477 (2013.01); H01L 41/0478 (2013.01); H01L 41/094 (2013.01);
Abstract

A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO, and the material of the piezoelectric body contains AlN.

Find Patent Forward Citations

Yamazaki, Takashi. (2016). Vibrator element, vibrator, oscillator, electronic apparatus, and moving object (U.S. Patent No. 9461615). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9461615

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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