The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Jul. 14, 2014
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Takashi Yamazaki, Shiojiri, JP;
Akihiko Ebina, Fujimi-machi, JP;
Tsuyoshi Tabata, Kawaguchi, JP;
Hidekazu Yanagisawa, Sakata, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/32 (2006.01); H01L 41/047 (2006.01); H03H 9/17 (2006.01); H03H 9/21 (2006.01); H03H 9/10 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H03H 9/17 (2013.01); H01L 41/0472 (2013.01); H03B 5/32 (2013.01); H03H 9/1014 (2013.01); H03H 9/21 (2013.01); H01L 41/0477 (2013.01); H01L 41/0478 (2013.01); H01L 41/094 (2013.01);
Abstract
A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO, and the material of the piezoelectric body contains AlN.