The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Feb. 28, 2011
Makoto Kubota, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Jumpei Hayashi, Chofu, JP;
Mikio Shimada, Kawasaki, JP;
Yuichi Shimakawa, Ibaraki, JP;
Masaki Azuma, Yokohama, JP;
Yoshitaka Nakamura, Osaka, JP;
Masanori Kawai, Ikoma, JP;
Makoto Kubota, Yokohama, JP;
Kenichi Takeda, Yokohama, JP;
Jumpei Hayashi, Chofu, JP;
Mikio Shimada, Kawasaki, JP;
Yuichi Shimakawa, Ibaraki, JP;
Masaki Azuma, Yokohama, JP;
Yoshitaka Nakamura, Osaka, JP;
Masanori Kawai, Ikoma, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
KYOTO UNIVERSITY, Kyoto-Shi, JP;
Abstract
Provided are a piezoelectric thin film having good piezoelectricity in which a rhombohedral structure and a tetragonal structure are mixed, and a piezoelectric element using the piezoelectric thin film. The piezoelectric thin film includes a perovskite type metal oxide, in which the perovskite type metal oxide is a mixed crystal system of at least a rhombohedral structure and a tetragonal structure, and a ratio between an a-axis lattice parameter and a c-axis lattice parameter of the tetragonal structure satisfies 1.15≦c/a≦1.30. The piezoelectric element includes on a substrate: the above-mentioned piezoelectric thin film; and a pair of electrodes provided in contact with the piezoelectric thin film.