The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Aug. 28, 2015
Stmicroelectronics (Tours) Sas, Tours, FR;
Centre National DE LA Recherche Scientifique—cnrs, Paris, FR;
Kilian Piettre, Linz, AT;
Pierre Fau, Toulouse, FR;
Jeremy Cure, Paris, FR;
Bruno Chaudret, Vigoulet Auzil, FR;
STMICROELECTRONICS (TOURS) SAS, Tours, FR;
Centre National de la Recherche Scientifique-CNRS, Paris, FR;
Abstract
A surface of a silicon substrate is coated with a silicon oxide layer. A manganese silicate layer is then deposited on the silicon oxide layer using a process of performing at least one step of dipping the substrate into a manganese amidinate solution. A copper layer is then deposited on the manganese silicate layer using a process of performing a step of dipping the substrate into a copper amidinate solution. An anneal is performed to stabilize one or both of the manganese silicate layer and copper layer.