The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2016

Filed:

Nov. 10, 2015
Applicant:

Samsung Display Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;

Inventors:

Sanghoon Ahn, Yongin-si, KR;

Byoungkwon Choo, Yongin-si, KR;

Byoungho Cheong, Yongin-si, KR;

Jeongkyun Na, Yongin-si, KR;

Seung Hwan Lee, Yongin-si, KR;

Joowoan Cho, Yongin-si, KR;

Hyunjin Cho, Yongin-si, KR;

Oleg Prudnikov, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-Si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/331 (2006.01); H01L 21/02 (2006.01); G02B 27/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02675 (2013.01); G02B 27/283 (2013.01); G02B 27/286 (2013.01);
Abstract

A method of manufacturing a display apparatus includes forming an amorphous silicon layer on a substrate, splitting a first laser beam emitted from a first laser source into a first master beam in a first polarization state and a second master beam in a second polarization state, changing the first polarization state of the first master beam to the second polarization state to output a third master beam having the second polarization state and corresponding to the first master beam having the second polarization state, combining the second master beam with the third master beam to output a merged laser beam, and irradiating the amorphous silicon layer with the merged laser beam to form a polysilicon layer.


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