The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2016

Filed:

Apr. 06, 2015
Applicants:

National Institute of Standards and Technology, Gaithersburg, MD (US);

Matthew D. Brubaker, Louisville, CO (US);

William M. Old, Denver, CO (US);

Inventors:

Kristine A. Bertness, Boulder, CO (US);

Matthew D. Brubaker, Louisville, CO (US);

William M. Old, Denver, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B82Y 35/00 (2011.01); B82Y 40/00 (2011.01); H01L 21/18 (2006.01); C30B 29/40 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02603 (2013.01); B82Y 35/00 (2013.01); B82Y 40/00 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/02381 (2013.01); H01L 21/02433 (2013.01); H01L 21/02439 (2013.01); H01L 21/02458 (2013.01); H01L 21/02507 (2013.01); H01L 21/02642 (2013.01);
Abstract

A nanowire article includes a substrate; a plurality of nanowires disposed on the substrate, the nanowires comprising a semiconductor nitride, the semiconductor comprising an element selected from group 3 of the periodic table; and a superlattice layer interposed between the substrate and the plurality of gallium nitride nanowires. A process for producing a nanowire article includes disposing a superlattice layer on a substrate; disposing a first buffer layer on the superlattice layer; contacting the first buffer layer with a precursor; and forming a plurality of nanowires from the precursor on the first buffer layer to form the nanowire article, the nanowires comprising a semiconductor nitride, the semiconductor comprising an element selected from group 3 of the periodic table. A process for producing a nanowire article includes nitrogenating a substrate to form a nitrogenated layer on the substrate; contacting the nitrogenated layer with a precursor; and forming a plurality of gallium nitride nanowires from the precursor on the nitrogenated layer to form the nanowire article in an absence of a catalyst, wherein individual gallium nitride nanowires of the plurality of gallium nitride nanowires include a length axis that is substantially perpendicular to the nitrogenated layer.


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