The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Aug. 06, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Sung Je Kim, Santa Clara, CA (US);
Soonam Park, Sunnyvale, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 17/26 (2012.01); H01J 37/32 (2006.01); C23C 14/08 (2006.01); C23C 14/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32559 (2013.01); C23C 14/081 (2013.01); C23C 14/083 (2013.01); C23C 14/28 (2013.01); H01J 37/32357 (2013.01); H01J 37/32422 (2013.01); H01J 37/32449 (2013.01);
Abstract
A faceplate or a selectivity modulation device (SMD) for a plasma generation chamber has a plasma resistant ceramic coating on a surface of the faceplate or SMD, wherein the plasma resistant ceramic coating comprises a thickness of less than approximately 30 microns, a porosity of less than 1% and a thickness non-uniformity of less than 4%.