The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Mar. 13, 2013
Kabushiki Kaisha Toshiba, Tokyo, JP;
Hiromu Inoue, Yokohama, JP;
Takeshi Fujiwara, Yokohama, JP;
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Abstract
A defect inspection apparatus including an illumination optical system, an image formation optical system, an image data conversion unit, a singular part detecting circuit, an optical path length adjusting mechanism, and a defect determining unit. The image formation optical system forms an optical image derived from light passing through first and second optical paths. The image data conversion unit converts, to image data, each of the optical images. The singular part detecting circuit detects a singular part in each of the image data. The optical path length adjusting mechanism equalizes the optical path lengths of the first and second optical paths. The defect determining unit determines a defect on the basis of singular part detection.