The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Aug. 19, 2014
Applicant:
Integrated Dynamics Engineering Gmbh, Raunheim, DE;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16F 15/027 (2006.01); F16F 15/023 (2006.01);
U.S. Cl.
CPC ...
F16F 15/027 (2013.01); F16F 15/0232 (2013.01);
Abstract
A vibration isolation system which comprises a support divided into a plurality of rigid sections on which a displaceable stage is arranged. The sections are arranged on pneumatic bearings, and the pneumatic bearings of the individual sections are controlled independently from each other and based on the position of the displaceable stage.