The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Jun. 06, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Izya Kremerman, Los Gatos, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/06 (2006.01); B25J 9/04 (2006.01); B25J 9/10 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B25J 9/043 (2013.01); B25J 9/042 (2013.01); B25J 9/107 (2013.01); H01L 21/67742 (2013.01); Y10S 414/139 (2013.01); Y10S 901/15 (2013.01); Y10T 74/20305 (2015.01);
Abstract
Robot apparatus, substrate transport systems, and methods are described. The robot apparatus and systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating robot assemblies to put or pick the substrates at the destination. Numerous other aspects are provided.