The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Sep. 09, 2013
Applicant:
Samsung Display Co., Ltd., Yongin-City, Gyeonggi-Do, KR;
Inventors:
Doh-Hyoung Lee, Guri-si, KR;
Jun Ho Jo, Seoul, KR;
Assignee:
Samsung Display Co., Ltd., Yongin, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); C23C 16/04 (2006.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); B23K 26/12 (2014.01); C23C 14/04 (2006.01); B23K 26/40 (2014.01);
U.S. Cl.
CPC ...
B23K 26/0093 (2013.01); B23K 26/0648 (2013.01); B23K 26/082 (2015.10); B23K 26/0853 (2013.01); B23K 26/127 (2013.01); B23K 26/364 (2015.10); B23K 26/40 (2013.01); C23C 14/042 (2013.01); C23C 16/042 (2013.01); B23K 2201/18 (2013.01); B23K 2203/04 (2013.01); B23K 2203/50 (2015.10);
Abstract
A mask substrate that includes a first area and a second area surrounding the first area is provided. Then, a laser beam is irradiated on the mask substrate to at least partly remove a material of the second area. After that, a physical force is applied to the mask substrate to separate the first area from the mask substrate thereby forming an opening through the mask substrate.