Dual-element mems microphone for mechanical vibration noise cancellation

Abstract

Disclosed are systems, devices, and methods for minimizing mechanical-vibration-induced noise in audio signals. In one aspect, a microphone is disclosed that includes a first backplate, a first diaphragm, a second backplate, and a second diaphragm. The first diaphragm moves relative to the first backplate in response to acoustic pressure waves in an environment and mechanical vibrations of the microphone, thereby causing a first capacitance change between the first diaphragm and the first backplate. The second diaphragm is substantially acoustically isolated from the acoustic pressure waves, and moves relative to the second backplate in response to the mechanical vibrations of the microphone, thereby causing a second capacitance change between the second diaphragm and the second backplate. The microphone further includes or is communicatively coupled to an integrated circuit configured to generate an acoustic signal based on the first capacitance and the second capacitance.