The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2016
Filed:
Dec. 19, 2013
Ushio Denki Kabushiki Kaisha, Tokyo-to, JP;
Mohamad Hussein El-Husseini, Milmort, BE;
Sven Walter Probst, Aachen, DE;
USHIO Denki Kabushiki Kaisha, Tokyo-to, JP;
Abstract
A method for triggering a resonant charging circuit for a device for generating short-wavelength radiation based on discharge plasma is described. Switching times of the resonant charging circuit are determined in a non-time-critical method segment by simulation and are stored to be repeatedly retrievable. Measurement values of the resonant charging circuit are determined in real time in a time-critical method segment. At least one second switching time (t) at which a discharging switch of the resonant charging circuit is triggered in order to supply at a firing time (t) a discharge voltage (U), and the firing time (t) are calculated. The device has a first input unit, a first simulation unit, a first regression unit, a first measurement value unit, a first evaluation unit and a control unit for triggering a discharging switch of the resonant charging circuit.