The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2016

Filed:

Mar. 25, 2014
Applicant:

National Applied Research Laboratories, Taipei, TW;

Inventors:

Jia-Min Shieh, Hsinchu, TW;

Wen-Hsien Huang, Hsinchu, TW;

Chang-Hong Shen, Hsinchu, TW;

Chih-Chao Yang, Hsinchu, TW;

Tung-Ying Hsieh, Hsinchu, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 27/088 (2006.01); H01L 29/04 (2006.01); H01L 27/12 (2006.01); H01L 21/822 (2006.01); H01L 27/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78678 (2013.01); H01L 21/8221 (2013.01); H01L 27/0688 (2013.01); H01L 27/1203 (2013.01); H01L 27/1222 (2013.01); H01L 29/04 (2013.01); H01L 29/78603 (2013.01); H01L 29/78675 (2013.01);
Abstract

A transistor device structure includes a substrate, a first polycrystalline semiconductor thin film and a first transistor unit. The first polycrystalline semiconductor thin film is disposed on the substrate. A grain diameter of the first polycrystalline semiconductor thin film is greater than 1 micrometer and a thickness of the first polycrystalline semiconductor thin film is less than three hundredths of the grain diameter. The first transistor unit is disposed on the first polycrystalline semiconductor thin film and includes a first gate dielectric layer and a first gate structure. The first gate dielectric layer is disposed on a surface of the first polycrystalline thin film semiconductor. The first gate structure is disposed on a surface of the first gate dielectric layer.


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