The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2016

Filed:

Dec. 25, 2013
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;

Inventors:

Tetsuya Yoshida, Kobe, JP;

Takeshi Shibata, Kakogawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B66F 19/00 (2006.01); H01L 21/68 (2006.01); H01L 21/67 (2006.01); B25J 15/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); B25J 15/0014 (2013.01); H01L 21/67259 (2013.01); H01L 21/67265 (2013.01); H01L 21/68707 (2013.01);
Abstract

An end effector includes: a hand; a substrate holder provided on the hand; a mapping detector provided at distal end portions and of the hand; a light emitter, which the hand is provided with and which is configured to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed such that the detection light emitted from the light emitter passes through the optical path to be incident on the light receiver; the optical path is formed such that detection light is blocked by a substrate detected in a cassette by the mapping detector, and such that detection light is blocked by a substrate held by the substrate holder.


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