The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2016
Filed:
Mar. 05, 2015
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Masahiro Kimura, Kyoto, JP;
Tomonori Kojimaru, Kyoto, JP;
Tetsuya Emoto, Kyoto, JP;
Manabu Okutani, Kyoto, JP;
Masayuki Otsuji, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/3105 (2006.01); H01L 21/321 (2006.01); H01L 21/67 (2006.01); B08B 3/08 (2006.01); H05K 3/22 (2006.01); F26B 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); B08B 3/08 (2013.01); F26B 1/00 (2013.01); H01L 21/02068 (2013.01); H01L 21/306 (2013.01); H01L 21/3105 (2013.01); H01L 21/321 (2013.01); H01L 21/6708 (2013.01); H01L 21/67028 (2013.01); H01L 21/67051 (2013.01); H05K 3/227 (2013.01);
Abstract
A hydrophobizing agent vapor is supplied to a substrate and a surface of the substrate including a pattern is hydrophobized. Thereafter, the substrate is dried by vaporizing the hydrophobizing agent. The substrate to be processed is maintained in a state of not contacting water until it is dried after being hydrophobized. Collapse of a pattern formed on the substrate surface is thereby suppressed or prevented.