The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Mar. 29, 2013
Applicant:

Sae Magnetics (H.k.) Ltd., Hong Kong, CN;

Inventors:

Wei Xiong, Hong Kong, CN;

Panjalak Rokrakthong, Hong Kong, CN;

Kenjiro Hata, Hong Kong, CN;

Kazushi Nishiyama, Hong Kong, CN;

Daisuke Iitsuka, Hong Kong, CN;

Atsushi Iijima, Hong Kong, CN;

Assignee:

SAE Magnetics (H.K.) Ltd., Hong Kong, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); H01L 41/12 (2006.01); G11B 21/16 (2006.01); H01L 41/297 (2013.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
H01L 41/18 (2013.01); G11B 5/483 (2015.09); G11B 21/16 (2013.01); H01L 41/0805 (2013.01); H01L 41/1876 (2013.01); H01L 41/297 (2013.01); H01L 41/316 (2013.01);
Abstract

A thin film piezoelectric element of the present invention includes a substrate and a piezoelectric thin film stack formed on the substrate. The piezoelectric thin film stack includes a top electrode layer, a bottom electrode layer and a piezoelectric layer sandwiched between the top electrode layer and the bottom electrode layer, wherein the piezoelectric layer includes a first piezoelectric layer and a second piezoelectric layer whose compositions have different phase structures. The present invention can obtain high piezoelectric constants, enhanced coercive field strength and good thermal stability, thereby enabling larger applied field strength without depolarization and achieving a large stroke for its applied device.


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