The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Nov. 17, 2015
Applicants:

Dongseog Eun, Seongnam-si, KR;

Young-ho Lee, Hwaseong-si, KR;

Joonhee Lee, Seongnam-si, KR;

Seok-won Lee, Yongin-si, KR;

Yoocheol Shin, Hwaseong-si, KR;

Inventors:

Dongseog Eun, Seongnam-si, KR;

Young-Ho Lee, Hwaseong-si, KR;

Joonhee Lee, Seongnam-si, KR;

Seok-won Lee, Yongin-si, KR;

Yoocheol Shin, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/768 (2006.01); H01L 23/498 (2006.01); H01L 27/115 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); H01L 21/441 (2006.01); H01L 27/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76805 (2013.01); H01L 21/31144 (2013.01); H01L 21/32139 (2013.01); H01L 21/441 (2013.01); H01L 21/76877 (2013.01); H01L 23/49844 (2013.01); H01L 27/1157 (2013.01); H01L 27/11548 (2013.01); H01L 27/11551 (2013.01); H01L 27/11575 (2013.01); H01L 27/11578 (2013.01); H01L 27/11582 (2013.01); H01L 27/2481 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Provided are methods of forming a stack of electrodes and three-dimensional semiconductor devices fabricated thereby. The device may include electrodes sequentially stacked on a substrate to constitute an electrode structure. each of the electrodes may include a connection portion protruding horizontally and outward from a sidewall of one of the electrodes located thereon and an aligned portion having a sidewall coplanar with that of one of the electrodes located thereon or thereunder. Here, at least two of the electrodes provided vertically adjacent to each other may be provided in such a way that the aligned portions thereof have sidewalls that are substantially aligned to be coplanar with each other.


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