The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Jul. 18, 2011
Applicants:
Blake R. Koelmel, Mountain View, CA (US);
Aaron M. Hunter, Santa Cruz, CA (US);
Alexander N. Lerner, San Jose, CA (US);
Inventors:
Blake R. Koelmel, Mountain View, CA (US);
Aaron M. Hunter, Santa Cruz, CA (US);
Alexander N. Lerner, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F27B 5/14 (2006.01); F27B 5/18 (2006.01); F27D 11/02 (2006.01); F27B 5/06 (2006.01); F27D 19/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); F27B 5/14 (2013.01); F27B 5/18 (2013.01); H01L 21/67248 (2013.01); F27B 5/06 (2013.01); F27D 11/02 (2013.01); F27D 2019/0003 (2013.01); H01L 21/67011 (2013.01);
Abstract
The present invention generally relates to methods and apparatus for processing substrates. Embodiments of the invention include apparatuses for processing a substrate comprising a ceramic reflector plate, which may be optically transparent. The reflector plate may include a reflective coating and be part of a reflector plate assembly in which the reflector plate is assembled to a baseplate.