The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Dec. 06, 2013
Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Inventor:
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/04 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/16 (2006.01); H01L 21/683 (2006.01); H01L 21/304 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0485 (2013.01); H01L 21/0475 (2013.01); H01L 21/304 (2013.01); H01L 21/3065 (2013.01); H01L 21/6835 (2013.01); H01L 21/6836 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01); H01L 29/7827 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68381 (2013.01);
Abstract

In a state where a silicon carbide substrate having a first main surface and second main surface opposite to each other is fixed to a base material having a higher flexibility than the silicon carbide substrate, silicon carbide on a side of second main surface of silicon carbide substrate is removed, and an electrode is formed on the second main surface. The base material has an area which is smaller than or equal to an area of the first main surface of the silicon carbide substrate. In the step of fixing silicon carbide substrate to the base material, the base material is arranged at a position of covering a center of the first main surface so that the base material does not extend beyond an outer circumference of the first main surface.


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