The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Aug. 04, 2015
Applicants:

Vivekananda P. Adiga, Albany, CA (US);

Gabriel Dunn, Berkeley, CA (US);

Alexander K. Zettl, Kensington, CA (US);

A. Paul Alivisatos, Berkeley, CA (US);

Inventors:

Vivekananda P. Adiga, Albany, CA (US);

Gabriel Dunn, Berkeley, CA (US);

Alexander K. Zettl, Kensington, CA (US);

A. Paul Alivisatos, Berkeley, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 1/12 (2006.01); H01J 37/16 (2006.01); H01J 37/26 (2006.01); H01J 37/20 (2006.01); H01L 29/68 (2006.01); H01L 29/78 (2006.01); H01L 29/16 (2006.01); C23C 18/08 (2006.01); H01L 29/66 (2006.01); G02B 21/16 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); G02B 1/12 (2013.01); C23C 18/08 (2013.01); G02B 21/16 (2013.01); H01J 37/26 (2013.01); H01J 2237/2003 (2013.01); H01L 29/1606 (2013.01); H01L 29/66045 (2013.01); Y10T 29/49002 (2015.01);
Abstract

This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.


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