The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Mar. 15, 2013
Applicant:

National Institute for Materials Science, Tsukuba-shi, Ibaraki, JP;

Inventors:

Masahiro Goto, Tsukuba, JP;

Akira Kasahara, Tsukuba, JP;

Masahiro Tosa, Tsukuba, JP;

Assignee:

NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Tsukuba-shi, Ibaraki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 5/00 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
C09D 5/00 (2013.01); C23C 14/086 (2013.01);
Abstract

[Problem to be Solved] To provide a ZnO coating having low friction not only in a vacuum but in a liquid such as oil. [Solution] The low-friction ZnO coating, comprising (002) and (103) planes, and further comprising (100), (101), (102), and (104) planes in lower proportions than those of the (002) and (103) planes, has been prepared by sputtering using a zinc target in a sputter gas environment, wherein the sputter gas comprises an inert gas and oxygen gas, and the oxygen gas ratio is controlled. This coating has a specifically good low friction coefficient due to the piezoelectric effect, and this friction reduction mechanism is maintained even in oil such as n-hexadecane. Thus, this coating has been found to have excellent low-friction properties.


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