The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Feb. 22, 2013
Applicant:
Technion Research and Development Foundation Ltd., Haifa, IL;
Inventors:
Boaz Pokroy, Haifa, IL;
Shirly Borukhin, Atlit, IL;
Assignee:
Technion Research and Development Foundatin Ltd., Haifa, IL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 16/01 (2006.01); B82B 3/00 (2006.01); H01L 21/02 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
B82B 3/0038 (2013.01); C23C 14/0005 (2013.01); C23C 16/01 (2013.01); H01L 21/02428 (2013.01); Y10T 428/24355 (2015.01);
Abstract
The present invention provides vicinal surfaces of polycrystalline materials and a method for their preparation. The method includes the deposition of a polycrystalline material on a substrate followed by removing the material from the substrate so as to expose a vicinal surface having stepped terraces. The step of removing the material from the substrate may be preceded by annealing. The vicinal surfaces are useful for a variety of applications.