The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Apr. 24, 2014
Applicant:
Denso Corporation, Kariya, Aichi-pref., JP;
Inventors:
Assignee:
DENSO CORPORATION, Kariya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); G01P 15/125 (2006.01); G01P 15/08 (2006.01); B81C 3/00 (2006.01); G01L 9/12 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0086 (2013.01); B81B 3/0021 (2013.01); B81C 3/001 (2013.01); G01L 9/12 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); B81B 2201/025 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0292 (2013.01); B81B 2203/0136 (2013.01); G01P 2015/0814 (2013.01); H01L 29/84 (2013.01);
Abstract
A capacitance type physical quantity sensor includes: a first substrate; and a second substrate bonded to the first substrate through an insulating film. The second substrate includes first and second groove portions at a place of the second substrate facing an end portion of the first and second support units formed on the first substrate on a side opposite to the movable unit. A part of the end portion of the first support unit protrudes over the first groove portion. A part of the end portion of the second support unit protrudes over the second groove portion.