The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

May. 22, 2014
Applicant:

Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, JP;

Inventors:

Yoshiki Kimura, Kitakyushu, JP;

Daisuke Shin, Kitakyushu, JP;

Assignee:

KABUSHIKI KAISHA YASKAWA DENKI, Kitakyushu-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 7/00 (2006.01); B65G 47/90 (2006.01); B25J 9/04 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); B25J 9/16 (2006.01);
U.S. Cl.
CPC ...
B65G 47/90 (2013.01); B25J 9/042 (2013.01); B25J 9/1679 (2013.01); H01L 21/67265 (2013.01); H01L 21/67766 (2013.01); G05B 2219/40087 (2013.01); G05B 2219/45031 (2013.01); Y10S 901/02 (2013.01);
Abstract

A substrate transfer robot includes a hand to approach a substrate storage on which a substrate is placed, and to hold the substrate. An arm moves the hand. A controller controls a position and orientation of the hand. When in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line. The hand center line is oriented from a base to a distal end of the hand. The access straight line is perpendicular to a front surface of the substrate storage and associated with the hand approaching the substrate storage.


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