The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Aug. 28, 2014
Applicant:
Avago Technologies General Ip (Singapore) Pte. Ltd., Singapore, SG;
Inventors:
Richard C. Ruby, Menlo Park, CA (US);
Steve Martin, Fort Collins, CO (US);
Brice Ivira, San Jose, CA (US);
Suresh Sridaran, Fort Collins, CO (US);
Assignee:
Avago Technologies General IP (Singapore) Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/54 (2006.01); H03H 9/02 (2006.01); H03H 9/08 (2006.01); H03H 9/17 (2006.01); H01L 41/047 (2006.01); H01L 41/04 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01);
U.S. Cl.
CPC ...
H03H 9/54 (2013.01); H03H 9/02086 (2013.01); H03H 9/02102 (2013.01); H03H 9/08 (2013.01); H01L 41/04 (2013.01); H01L 41/0477 (2013.01); H03H 3/02 (2013.01); H03H 9/132 (2013.01); H03H 9/171 (2013.01);
Abstract
An film bulk acoustic wave resonator (FBAR) structure has an FBAR and a via disposed substantially directly beneath the FBAR. The via is in thermal contact with the FBAR. A plurality of vias may be included. The via(s) serve to dissipate heat generated by the FBAR structure during operation.