The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2016

Filed:

Jul. 10, 2014
Applicants:

Denso Corporation, Kariya, Aichi-pref., JP;

National University Corporation Toyohashi University of Technology, Toyohashi-shi, Aichi, JP;

Inventors:

Noriyuki Matsushita, Nagoya, JP;

Hiroyuki Wado, Toyota, JP;

Makoto Ishida, Toyohashi, JP;

Daisuke Akai, Toyokawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 26/12 (2006.01); H01L 41/187 (2006.01); H01L 41/08 (2006.01); H01L 41/297 (2013.01); G02B 6/35 (2006.01); H01L 41/047 (2006.01); H01L 41/29 (2013.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01); H01L 41/319 (2013.01); G02F 1/29 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); G02B 6/3578 (2013.01); G02B 26/0858 (2013.01); H01L 41/0478 (2013.01); H01L 41/081 (2013.01); H01L 41/0815 (2013.01); H01L 41/29 (2013.01); H01L 41/297 (2013.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01); H01L 41/319 (2013.01); G02F 2001/294 (2013.01); Y10T 29/42 (2015.01);
Abstract

A piezoelectric element includes a substrate having a first surface with a predetermined orientation; a lower electrode layered on the first surface of the substrate; a piezoelectric thin film layered on the lower electrode and having a piezoelectric body; and an upper electrode layered on the piezoelectric thin film. A voltage is to be impressed between the lower electrode and the upper electrode to deform the piezoelectric thin film. The piezoelectric thin film is epitaxially grown on the lower electrode using a physical vapor deposition or a chemical vapor deposition.


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